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Home News Technical articles Application of Microporous Membrane Filter in Semiconductor Industry

Application of Microporous Membrane Filter in Semiconductor Industry

2024-03-10 Eternalwater CMP filtering
CMP refers to the grinding process of wafer production in the semiconductor industry. It uses grinding tools and grinding polishing fluid to smooth the wafer. The slurry particles of the grinding and polishing fluid are widely distributed from 30-200μm. According to the standard, the slurry particles should be controlled Within 0.5μm. If particles larger than 0.5μm are not filtered out, the wafer surface will be scratched, so slurry filtration becomes a key point in the process. CMP filter elements help customers remove particles that affect products during CMP filtration and release effective particles.

Photolithography process filtering
The photolithography process is a micro-pattern transfer process. As the line width of semiconductor processing becomes smaller and smaller, the photolithography process is extremely demanding on the control of very small contaminants. It not only strictly controls the particles, but also strictly controls the metal ion precipitation of the filter products. This places particularly high demands on filter element production and manufacturing. Filtration provides semiconductor customers with semiconductor-grade perfluorinated filter elements. Ultra-low metal precipitation and dissolution ensures the cleanliness of products.

Factory system filtration
During the semiconductor manufacturing process, the factory system provides FAB with clean process gases, ultrapure water, and ultrapure electronic chemicals for manufacturing. Large batches and long-term uninterrupted supply place high requirements on the stability of filtration. Hengshui Filtration provides proprietary filtration products for plant system filtration. High-flow filter element products, perfluorinated corrosion-resistant products, and high-precision and high-efficiency filtration products provide services for the safe supply of factory systems.

membrane pleated filter cartridge

Electronic chemical filtration
As a key material for semiconductor manufacturing, ultra-clean electronic chemicals play a key role in the production process of semiconductors. Various electronic chemicals with different characteristics have different requirements for filtration products. The cleanliness of filtration products is low. Precipitation has strict requirements. Hengshui Filtration uses industry-leading equipment to strictly control the cleanliness of filtration products. Low precipitation and low metal ion products provide help for the stable, safe and reliable production of the semiconductor industry.
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