CMP process

  • CMP process introduction and filter element

    CMP, namely chemical mechanical polishing, is a combination of chemical corrosion and mechanical friction. The equipment and consumables used in CMP technology include polishing machine, polishing slurry, polishing pad, post CMP cleaning equipment, polishing end point detection and process control equipment, waste treatment and detection equipment, etc. Polishing machine, polishing slurry and polishing pad are three key elements of CMP process. Their performance and mutual matching determine the surface flatness level that CMP can achieve. In the process, the polishing slurry particles are controlled at 0.5 μ Within M.
related products



    Depth Filter Cartridge ESP Series
    Depth Filter Cartridge ESP Series
    The ESP Series depth filter cartridge is made of polypropylene (PP) filter material and is suitable for gel removal and pre-filtration of the liquid with high particle impurity content, which can greatly improve filtration stability and reduce the penetration of gel and particle impurities.
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    KBLV0225TG Sterilizing grade capsule filter 5inch KB Series
    KBLV0225TG Sterilizing grade capsule filter 5inch KB Series
    Eternalwater KB series--KBLV0225TG Sterilizing grade capsule filter 5inch KB Series, which can be applied in biological process steps. Satisfying the application from small experiment to large-scale production, it has excellent filtration performance and reliable sterilization guarantee.
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    Seven-core capsule filter Used for high flow rate EAH Series
    Seven-core capsule filter Used for high flow rate EAH Series
    EAH Series seven-core capsule filter adopts an integrated design. On the basis of meeting the gradient winding structure of the polypropylene filter material, the filter area is increased by increasing the number of winding filter elements, effectively improving the filtration efficiency, thereby achieving the effect of long service life.
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    Bag filter HDL series
    Bag filter HDL series
    HDL series stainless steel bag filter is made of SUS316L or SUS304 stainless steel. O-shaped sealing design and properly configured sealing ring links ensure reliable system sealing , whether it is a single-bag or multi-bag filter . The built-in filter basket prevents the filter bag from sinking under working pressure and ensures no spillage. It can be used for coarse filtration, medium filtration or fine filtration. It is widely used in industrial water, pharmaceutical water, food and beverage industry, electronics industry, etc.
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    Security filter HRM series
    Security filter HRM series
    HRM series precision filters, also known as security filters, are made of SUS316L or SUS304 stainless steel. Using a single or multiple melt-blown filter cartridges as filter elements, the raw liquid passes through the filter material under pressure, which can effectively remove impurities, sediments and suspended solids in the water. It is usually used in some occasions with large flow rate and is an ideal equipment for pre-filtration.
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    Large flow filter housing HJM series
    Large flow filter housing HJM series
    HJM series stainless steel filter housings are made of SUS316L or SUS304 stainless steel. Using single or multiple filter cartridges as filter elements, it has the advantages of high filtration precision, fast filtration speed, no leakage, acid and alkali resistance, corrosion resistance, and easy cleaning. In order to prevent the suspended particles that were not completely removed or newly generated during the pretreatment from entering the reverse osmosis system and protect the high-pressure pump and reverse osmosis membrane, it is usually used in some occasions with large flow rates, especially in the field of water treatment.
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    Liquid filter bag ELD series
    Liquid filter bag ELD series
    ELD series liquid filter bags are made of high-quality polypropylene, polyester, nylon, etc. as filter materials and are produced according to specific working conditions and application requirements. The surface can be singed, calendered or coated to effectively prevent fibers from falling off and contaminating the filtrate . The fluffy and uniform three-dimensional filter layer has extremely high capturing power for solid and colloidal particles. The high-strength long fibers make the filter bag have stable filtration efficiency and longer service life. It has the characteristics of high interception rate, strong dirt holding capacity, large flow rate and high pressure resistance. Widely used in liquid impurity removal and filtration in various industries.
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    External pressure melt-blown (PP cotton) filter cartridge ERP Series
    External pressure melt-blown (PP cotton) filter cartridge ERP Series
    ERP series melt-blown filter cartridges are made of hot-melt entangled pure polypropylene microfibers without using any chemical adhesives. The fibers are randomly bonded in space to form a three-dimensional microporous structure, which integrates surface, depth and fine filtration. The deep filtration structure with gradient pores that are sparse on the outside and dense on the inside has strong dirt-holding capacity. According to different production processes, it can be divided into six appearances: smooth/needle- punched/ rough type/orange peel/fine lines/grooved . It can be selected according to actual usage. Mainly It is used in particle interception, clarification filtration, and security filtration. It has good permeability and is a relatively economical pre-filtration filter cartridge.
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    Bag type large flow filter element END Series
    Bag type large flow filter element END Series
    END series bag-type high-flow filter Cartridges are innovations and breakthroughs in the design and production of traditional bag filters. It can be directly installed in the filters of No. 1 and No. 2 filter bags without further modification to save investment costs. The pleated structure has a larger filtering area and dirt holding capacity, which prolongs the service life and reduces the number of times the filter needs to be replaced. It is easy to install and operate.
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    Outside pressure large flow filter cartridge EYD Series
    Outside pressure large flow filter cartridge EYD Series
    The EYD series has a large flow rate of up to 6.7 inches and a large diameter structure with a high-strength polypropylene support frame inside, and a polypropylene mesh or PP frame for external support. The effective filtration area is greatly increased, the dirt holding capacity can be increased, the number of filter cartridges and the size of the shell can be reduced, and the input cost can be saved.
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    Outside pressure large flow filter cartridge EWD Series
    Outside pressure large flow filter cartridge EWD Series
    EWD series high-flow filter cartridges are designed with double O-rings to ensure the reliability of the seal. The inner frame is made of glass fiber reinforced polypropylene material and wrapped with polypropylene woven mesh. The deep filter structure can effectively intercept impurity particles of different sizes. Strong compression resistance , good chemical compatibility , wide application fields.
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    Outside pressure large flow filter cartridge EFD Series
    Outside pressure large flow filter cartridge EFD Series
    The inner frame of EFD series PHOSPHOR style large flow filter cartridge is made of glass fiber reinforced polypropylene material, wrapped with nylon plastic woven mesh. The deep filter structure can effectively intercept impurity particles of different sizes. Strong compression resistance , good chemical compatibility , wide application fields.
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    External pressure large flow filter cartridge EBMD Series
    External pressure large flow filter cartridge EBMD Series
    EBMD series 226 connector high-flow filter cartridge adopts deep layer fine polypropylene fiber membrane as the core filter material of the filter cartridge. The large diameter provides a larger filtration area, the internal design center rod strengthens the support, the cross handle design is convenient for installation and removal, and the flow direction is from outside to inside. Can replace imported models: HF40PP005, HF40PP040, HF40PP010, HF40PP070, HF40PP100
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    Backwashable string wound filter cartridges E70D-L Series
    Backwashable string wound filter cartridges E70D-L Series
    E70D-L series string wound filter cartridges are generally used in the condensate polishing system of power plants. The condensate polishing powder resin covered filter requires stable operation at a relatively high temperature. Its high strength can fully withstand the instantaneous high-pressure impact generated during resin bursting and backwashing. The filter cartridge is controlled by computer, and it is made by winding PP cotton thread or absorbent cotton thread precisely on 304 stainless steel porous skeleton. Ensure that the filter cartridge does not deform, avoid fiber shedding, and ensure the safe operation of the system.
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    Outside pressure large flow filter cartridge EHMD Series
    Outside pressure large flow filter cartridge EHMD Series
    The EHMD series high flow filter cartridge adopts the horizontal folding design to maximize the effective filtering surface of the filter cartridge. High-performance polypropylene fiber membrane is used as the filter material, which optimizes its filtration performance to ensure its high-efficiency interception.
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    Tank breathers HV Series
    Tank breathers HV Series
    Breathing filter, installed on all kinds of storage tanks, pure water tanks, sterile and dry ventilation holes. Ensure that the gas is isolated from the outside world through the respirator, and the discharge is smooth. Prevent the storage tank from being polluted by bacteria and dust in the air when the tank is ventilated due to liquid level changes.
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    Sanitary grade pipe filter HG Series
    Sanitary grade pipe filter HG Series
    In-line pipeline filter, the cylinder body is made of high-quality 304 or 316L stainless steel, which has good corrosion resistance, and the design and manufacture meet the requirements of sanitary and GMP. Input on top and output on the bottom, quick opening connection, equipped with exhaust and drain ports, can be used for filtration of gas and liquid.
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    Stainless steel gas filter HQ Series
    Stainless steel gas filter HQ Series
    The stainless steel gas filter is specially designed and manufactured for gas filtration. It can be used in sterile gas and fermentation gas filtration with PTFE gas sterilization filter cartridge or glass fiber filter cartridge. The filter cartridge is lined with stainless steel, which can withstand high temperature gas filtration, high accuracy, high flow to ensure filtration efficiency and cost of use.
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    Flip-over titanium rod filter HTB Series
    Flip-over titanium rod filter HTB Series
    The housing of the titanium rod filter is made of 304 or 316L stainless steel, and the titanium metal or stainless steel filter cartridge is used as the filter element, which can achieve a good solid-liquid separation effect by filtering the liquid with high solid content. It has the advantages of high temperature resistance, strong acid, strong alkali, corrosion resistance, and the filter cartridge can be regenerated repeatedly. It is widely used in decarbonization filtration in large infusion and injection production lines.
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    Multi-core sanitary liquid filter HYD Series
    Multi-core sanitary liquid filter HYD Series
    Cylinder, head, flange, connecting pipe, welding rod and other materials are strictly selected and processed finely. It can be designed according to the requirements of the flow rate and meets the requirements of sanitation and GMP. mechanicalpolished, no sanitary dead corners, easy to clean, no residue.Easy disassembly and installation, scientific structure and many types. Widely used in biopharmaceutical, food and beverage industries.
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    Single core sanitary liquid filter HY1 Series
    Single core sanitary liquid filter HY1 Series
    Single core stainless steel liquid filter, made of SUS316L stainless steel. One filter cartridge is used as the filter cartridge, and the design meets the requirements of sanitation and GMP. Mechanical polishing, no sanitary dead corners, small flow resistance, acid and alkali resistance, corrosion resistance, convenient cleaning and disinfection, etc. It is suitable for the filtration of small flow in the pharmaceutical and food industries.
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    Microporous membrane ML Series
    Microporous membrane ML Series
    Eternalwater microporous membranes ML series--can provide various materials and different pore sizes according to different filtration requirements. It is suitable for laboratory liquid analysis and filtration, etc.
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    Disposable disc filter 50mm KS Series
    Disposable disc filter 50mm KS Series
    Eternalwater KS series--Disposable disc filters can be equipped with a variety of membrane materials, which are widely used in biopharmaceutical industry, laboratories and other processes. Suitable for small flow liquid and gas sterilization filtration, 100% integrity testing.
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    Sterilizing grade capsule filter 2 inch / 4 inch KMX Series
    Sterilizing grade capsule filter 2 inch / 4 inch KMX Series
    Eternalwater KMX series--of capsule filter products cover a variety of specifications and materials and can be applied to bioprocess filtration steps. They meet the requirements of applications from small-scale experiments to large-scale production, with superior filtration performance and reliable sterilization protection.
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    Sterilizing grade capsule filter 2 inch / 4 inch KMT Series
    Sterilizing grade capsule filter 2 inch / 4 inch KMT Series
    Eternalwater KMT series--of capsule filter products cover a variety of specifications and materials and can be applied to bioprocess filtration steps. They meet the requirements of applications from small-scale experiments to large-scale production, with superior filtration performance and reliable sterilization protection.
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    Sterilizing grade capsule filter 2 inch / 4 inch KMH Series
    Sterilizing grade capsule filter 2 inch / 4 inch KMH Series
    Eternalwater KMH series--of capsule filter products cover a variety of specifications and materials and can be applied to bioprocess filtration steps. They meet the requirements of applications from small-scale experiments to large-scale production, with superior filtration performance and reliable sterilization protection.
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    Sterilizing grade capsule filter 0.5inch / 1inch KC Series
    Sterilizing grade capsule filter 0.5inch / 1inch KC Series
    Eternalwater KC series--of capsule filter products cover a variety of specifications and materials and can be applied to bioprocess filtration steps. They meet the requirements of applications from small-scale experiments to large-scale production, with superior filtration performance and reliable sterilization protection.
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    Metal filter cartridge
    Metal filter cartridge
    Eternalwater EWK series--metal filter cartridges are made of five layers of 316L or 304 stainless steel sintered mesh by vacuum sintering or stainless steel dense mesh by folding and welding. It has the properties of high pressure resistance, high temperature resistance, corrosion resistance, good mechanical properties and easy regeneration. Suitable for liquid filtration under high temperature and high pressure conditions.
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    Titanium metal filter cartridge
    Titanium metal filter cartridge
    Eternalwater EBT series--adopt high-purity titanium powder (99.6%), which be sintered at high temperature. The surface particles are not easy to fall off, with average pore size and strong resistance of acid , alkali, high temperature, high pressure, anti-oxidation. Widely used in various industries of liquid of containing rigid particles, gas purification, and separation filtration.
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    Small size diameter 56mm filter cartridge
    Small size diameter 56mm filter cartridge
    Eternalwater E56X series--filter cartridges have characteristics of compact structure, small volume, and less loss of filter media.Designed for small-volume gas and liquid filtration, widely used in laboratory small-volume filtration.
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    Ultra-high dirt holding capacity multi-layer gradient pleated filter cartridge (PP)
    Ultra-high dirt holding capacity multi-layer gradient pleated filter cartridge (PP)
    Eternalwater EDP Series--adopts multi-layer ultra-fine polypropylene fiber membrane structure, and the polypropylene fiber membrane has characteristic of gradient pore size. Particles can be intercepted step by step to achieve deep filtration. At the same time, the dirt holding capacity is greatly improved, which is suitable for the filtration of high suspended particles, colloidal substances, and high viscosity liquids.
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    Strong adsorption capacity activated carbon fiber filter cartridge
    Strong adsorption capacity activated carbon fiber filter cartridge
    Eternalwater EJA Series--High-performance purification grade activated carbon fiber filter cartridges adopt ACF material, which has high flow rate and high retention rate performance, and is used for purification, deodorization, decolorization, and organic matter removal. Effectively filter out residual chlorine in liquid and gas.
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    Nylon 66 sterilizing grade filter cartridge
    Nylon 66 sterilizing grade filter cartridge
    Eternalwater EYNN Series--Filter cartridges are made of natural hydrophilic nylon (Nylon) 66 membrane, which can absorb and remove particles, bacteria and endotoxin smaller than the filtration precision. High porosity and high flow rate are suitable for alkaline liquid filtration.
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    Hydrophobic gas sterilization polyethersulfone (PES) filter cartridge
    Hydrophobic gas sterilization polyethersulfone (PES) filter cartridge
    Eternalwater EST Series--Gas sterilization polyethersulfone filter cartridges adopt hydrophobic polyethersulfone membrane,which has superior performance of high flow rate, low pressure drop, high temperature resistance and high retention rate. Mainly used in gas sterilization and filtration of biological fermentation, pharmaceutical industry
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    Gas sterilization grade PTFE filter cartridge
    Gas sterilization grade PTFE filter cartridge
    Eternalwater EKT Series--Gas sterilizing filter cartridges adopt hydrophobic (PTFE ) membrane, which has superior performance of high flow rate, low pressure drop, high temperature resistance and high retention rate.Mainly used in gas sterilization and filtration of biological fermentation, pharmaceutical industry
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    Hydrophilic PTFE sterilization grade filter cartridge
    Hydrophilic PTFE sterilization grade filter cartridge
    Eternalwater ELT Series--Sterilizing filter cartridges adopt hydrophilic polytetrafluoroethylene (PTFE)membrane. Filter cartridge does not require pre-wetting passes Pseudomonas diminuta (ATCC ® 19146) retention test. It can be used for sterilization and filtration of medicinal liquids Hydrophilic PTFE sterilization grade filter cartridge ELT Series containing organic solvents in the pharmaceutical industry
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    Double-layer polyethersulfone(PES) severe terminal sterilization grade filter cartridge
    Double-layer polyethersulfone(PES) severe terminal sterilization grade filter cartridge
    Eternalwater EDPSH series--Filter cartridges adopt a combination of double-layer membranes with different pore sizes or the same pore size, and a highly asymmetric pore structure polyethersulfone membrane, which makes the filter cartridge have excellent filtration performance and reliable bacterial retention capacity. It can be widely used in severe terminal sterilization and filtration in industries such as bio-pharmaceutical industry.
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    Low diffusion flow polyethersulfone (PES) sterilization grade filter cartridge
    Low diffusion flow polyethersulfone (PES) sterilization grade filter cartridge
    Eternalwater EHPSH Series--Filter cartridges use a highly asymmetric single-layer polyethersulfone (PES) membrane. With extremely high flow rate and capacity, it is suitable for high-viscosity pharmaceutical sterile filtration. It has the properties of ultra-low diffusion flow, low protein adsorption and high retention rate. The good heat resistance of the filter cartridge can be steam sterilized many times, and the integrity test before leaving the factory ensures the high quality of the product.
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    High bubble point and long life polyethersulfone(PES) sterilization grade filter cartridge
    High bubble point and long life polyethersulfone(PES) sterilization grade filter cartridge
    Eternalwater EAPSH Series--Polyethersulfone membrane pleated filter cartridges adopt imported asymmetrical unsupported PES membrane, its pore size gradually decreases with depth, this structure maintains a certain Consistent porosity and retention. All elements of the filter cartridge comply with FDA regulations for food contact use. It has high retention rate and super hydrophilicity. The good heat resistance of the filter cartridge can be steam sterilized many times, suitable for most of the terminal sterilization filtration in the bio-pharmaceutical industry.
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    Internal pressure large flow filter cartridge EPD Series
    Internal pressure large flow filter cartridge EPD Series
    EPD series high-flow filter cartridge adopts 6" large diameter structure with one-way opening. The liquid flows from the inside to the outside to ensure that the particles are intercepted inside the filter cartridge. It is made of high-purity polypropylene filter material and support layer by hot-melt welding. Without any adhesive and other additives, with extremely low levels of extractables. Wide chemical compatibility is suitable for filtration needs in various fields.
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    Outside pressure large flow filter cartridge EMD Series
    Outside pressure large flow filter cartridge EMD Series
    EMD series high-flow filter cartridge adopts high-performance polypropylene membrane/glass fiber membrane, and the pleated design makes the filter cartridge have a larger effective filtration area. Ergonomically designed end handles ensure quick and easy installation and removal. The twist-to-lock design provides a reliable mechanical seal.
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    Outside pressure large flow filter cartridge EKD Series
    Outside pressure large flow filter cartridge EKD Series
    EKD series high-flow filter cartridge adopts large diameter (6 " ) structure, folded and welded. It has a high-strength polypropylene support frame inside, and the liquid flow direction is from the outside to the inside. The external support is an integral polypropylene frame and Polyester filter. Two kinds of structures.Special structure makes it have a larger filtration area .
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    Folded filter cartridge can be backwashed E70D Series
    Folded filter cartridge can be backwashed E70D Series
    E70D series pleated filter cartridges are widely used in the pre-filtration of condensate polishing treatment in power plants. High-purity polypropylene filter material is selected, and the whole is hot-melt welded. The internal and external skeleton structure can be reused after backwashing. 10μm filter cartridges are recommended when the unit is started, and 1μm and 4μm filter cartridges are recommended for normal operation.
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    Syringe filter
    Syringe filter
    Eternalwater KZ series--syringe filters are suitable for prefiltration of small amount of samples in the laboratory, clarification and removal of particles, and sterilizing filtration of liquids and gases. Low adsorption to samples ensures maximum sample recovery. The housing is made of polypropylene (PP), which has excellent chemical stability. A variety of filter membranes and specifications are available.
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